Three kinds of coplanar waveguides （CPWs） are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate （LRS）, LRS with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon （HRS） substrate. The results show that the microwave loss of a CPW on LRS is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the CPW transmission lines and the LRS.A CPW directly on HRS shows a loss lower than 2dB/cm in the range of 0-26GHz and the process is simple,so HRS is a more suitable CPW substrate.
An integratable distributed Bragg reflector laser is fabricated by low energy ion implantation induced quantum well intermixing.A 4 6nm quasi continuous wavelength tuning range is achieved by controlling phase current and grating current simultaneously,and side mode suppression ratio maintains over 30dB throughout the tuning range except a few mode jump points.
A semiconductor optical amplifier gate based on tensile strained quasi bulk InGaAs is developed.At injection current of 80mA,a 3dB optical bandwidth of more than 85nm is achieved due to dominant band filling effect.Moreover,the most important is that very low polarization dependence of gain (<0 7dB),fiber to fiber lossless operation current (70～90mA) and a high extinction ratio (>50dB) are simultaneously obtained over this wide 3dB optical bandwidth (1520～1609nm) which nearly covers the spectral region of the whole C band (1525～1565nm) and the whole L band (1570～1610nm).The gating time is also improved by decreasing carrier lifetime.The wide band polarization insensitive SOA gate is promising for use in future dense wavelength division multiplexing (DWDM) communication systems.
