A novel silicon-on-insulator (SOI) high-voltage device based on epitaxy-separation by implantation oxygen (SIMOX) with a partial buried n +-layer silicon-on-insulator (PBN SOI) is proposed in this paper.Based on the proposed expressions of the vertical interface electric field,the high concentration interface charges which are accumulated on the interface between top silicon layer and buried oxide layer (BOX) effectively enhance the electric field of the BOX (E_I),resulting in a high breakdown voltage (BV) for the device.For the same thicknesses of top silicon layer (10 μm) and BOX (0.375 μm),the E I and BV of PBN SOI are improved by 186.5% and 45.4% in comparison with those of the conventional SOI,respectively.
详细研究了一种基于薄埋氧层及三层顶层硅衬底(Triple-Layer Top Silicon,TLTS)的SOI高压LDMOS器件。该结构在SOI介质层上界面的顶层硅内引入一高浓度n+层,当器件处于反向阻断状态时,高浓度n+区部分耗尽,漏端界面处已耗尽n+层内的高浓度电离施主正电荷可增强介质层电场,所产生的附加电场将调制漂移区内的电场,防止器件在漏端界面处被提前击穿,从而可在较薄的埋氧层(BOX)上获得较高耐压。在0.4μm BOX上获得了624V的耐压。与几种SOI器件相比,所提出的TLTS LDMOS器件具有较高优值(FOM)。
A novel partial silicon-on-insulator laterally double-diffused metal–oxide–semiconductor transistor(PSOI LDMOS)with a thin buried oxide layer is proposed in this paper. The key structure feature of the device is an n+-layer, which is partially buried on the bottom interface of the top silicon layer(PBNL PSOI LDMOS). The undepleted interface n+-layer leads to plenty of positive charges accumulated on the interface, which will modulate the distributions of the lateral and vertical electric fields for the device, resulting in a high breakdown voltage(BV). With the same thickness values of the top silicon layer(10 μm) and buried oxide layer(0.375 μm), the BV of the PBNL PSOI LDMOS increases to 432 V from285 V of the conventional PSOI LDMOS, which is improved by 51.6%.
