This paper studies the numerical simulation for semiconductor devices and discusses the software design of the simulation system. Our focus is on the deep submicron device simulation for BJT, MOSFET, heterojunction bipolar transistors (HBT), etc. So the object oriented technology for software design and its realization is used to make the system easy to implement, maintain and extend. Besides the discussion of simulation and software system design, this paper introduces a device simulator SMDS and its parallel extension under local network environment using CORBA technology.