The investigation on proton irradiation and thermal annealing of AlGaAs/GaAs solar cells has been reported.The energy of the proton irradiation is 325keV and the fluences are ranging from 5×10 10 to 1×10 13 cm -2 .It is demonstrated that the irradiation-induced degradation in the photovoltaic performance of the solar cells exists mainly in the short circuit current and the irradiation damage can be partly recovered by low temperature annealing at 200℃.In addition,it is found that the borosilicate cover glass has an obvious protection effect against the proton irradiation.