TiO 2 nanoparticle film catalysts with different thicknesses were prepared by plasma enhanced chemical vapor deposition(PECVD) method and the surfaces were subsequently treated by TiCl 4 or O 2 plasma. Two kinds of TiO 2 films with different surface properties were obtained. Their surface microstructures and energy levels of surface states were tested by AFM, XRD, SPS. The photocatalytic activities of the catalysts were determined via photodegradation experiments of phenol. The results demonstrated that photocatalytic activities of samples whose surface was treated by O 2 plasma were greater than those treated by TiCl 4 plasma. Moreover, photodegradation ratio of phenol during the first hour catalyzed by 0.17 μm thickness TiO 2 nanoparticle film was greater than other samples. Especially, the difference of photocatalytic activities of TiO 2 nanoparticle films treated by TiCl 4 or O 2 plasma was respectively explained by energy band theory.
TiO2 nanoparticulate films were prepared by means of Plasma-enhanced Chemical Vapor Deposition （PECVD）. By further surface treatment by TiCl4 or O2 plasma, films with dif- ferent surface properties were obtained. It was found that treatment by TiCl4 plasma enhanced the amount of Ti3+ suiface state and Ti dislocation of the film, detected by the surface photovoltage spectroscopy, while O2 plasma surface treating enhanced its amount of O2 surface state. It was also indicated by the H2O adsorption experiment that film treated by O2 plasma had larger separation efficiency for photogenerated carriers than the one treated by TiCl4 plasma.
