The major and trace level elements in cadmium zinc telluride (CZT) were detected by used of glow discharge mass spectrometry (GDMS). Results show that GDMS is a powerful tool for analyzing trace level elements in solid sample. The semi quantitative analysis can be carried out in the situation of having no standard sample. However, standard sample with the same (or similar) composition must be provided if the major elements want to be known. Only after getting the special relative sensitivity factors (RSF) can the accurate compositions of major elemental be calculated.
