Europium doped stable and transparent yttria films were prepared by a sol-gel method using Y(NO 3) 3 and Eu(NO 3) 3 as raw materials followed by calcinations at 600~900 ℃. The red-emission Y 2O 3:Eu thin films were prepared by dip-draw coating technique on the surface of quartz glass and silica glass, respectively. Addition of PVA-124 favoured the formation of the smooth film. The film structures were analyzed by XRD. The excitation spectrum consists of a wide excitation peak between 220 nm to 260 nm, with strengest emission peak at 614nm.