A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.
通过理论模拟和计算对基于氟钇钠(Na YF4)∶镱(Yb^(3+)),铒(Er^(3+))纳米晶的聚合物光波导放大器在1.55 mm处的增益特性进行了研究。分析中采用的波导芯层为Na YF4∶18%Yb^(3+),10%Er^(3+)纳米晶掺杂的SU-8 2005聚合物,包层为P(MMAGMA)聚合物。通过测试和分析纳米晶材料的吸收光谱和荧光光谱,利用Judd-Ofelt理论计算出了相应的Judd-Ofelt参数:Ω2=6.302×10-20cm2,Ω4=0.69×10-20cm2,Ω6=7.572×10-20cm2。通过求解原子速率方程与光功率传输方程模拟分析了波导放大器在1.55μm波长的增益特性,得到的增益曲线具有饱和效应,当Er^(3+)离子浓度为7.5×1025m-3时获得的最大增益为9.7 d B。以Si O2作为下包层,Na YF4∶Yb^(3+),Er^(3+)纳米晶掺杂的SU-8 2005聚合物作为芯层,P(MMA-GMA)聚合物作为上包层,制备了聚合物光波导放大器,当波长为980 nm的抽运光功率为170 m W、信号光功率为0.1 m W时,器件获得的最大相对增益为3.42 d B/cm。
设计并制作了一种基于马赫-曾德尔干涉仪(MZI)结构的低功耗聚合物热光开关。聚合物材料具有低热导率和高热光系数的优点,可以有效降低热光器件的功耗。在Si O2衬底上,采用热光系数较大的Norland紫外固化胶(NOA73)作为波导芯层,聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物[P(MMA-GMA)]作为波导的上包层,设计了热光开关器件,并对光场和热场进行了模拟,采用传统的半导体工艺完成了热光开关器件的制备。器件的测试结果表明,在1550 nm工作波长下,热光开关器件的消光比为20.2 d B,驱动功率仅为9.14 m W,开关的上升时间为174μs,下降时间为292μs。
100-GHz cross-cascaded arrayed waveguide gratings （AWGs）-based wavelength selective optical switching optical cross-connects （OXCs） modules with Mach-Zehnder interferometer （MZI） thermo-optic （TO） variable optical attenuator （VOA） arrays and optical true- time-delay （TTD） line arrays is successfully designed and fabricated using polymer photonic lightwave circuit. Highly fluorinated photopolymer and grafting modified organic-inorganic hybrid material were synthesized as the waveguide core and cladding, respectively. The one-chip transmission loss is -6 dB and the crosstalk is less than -30 dB for the transverse-magnetic （TM） mode. The actual maximum modulation depths of different thermo-optic switches are similar, -15.5 dB with 1.9 V bias. The maximum power consumption of a single switch is less than 10 mW. The delay time basic increments are measured from 140 to 20 ps. Proposed novel module is flexible and scalable for the dense wavelength division multiplexing network.
Visible light variable optical attenuators（VOA） are essential devices in the application of channel power regulation and equalization in wavelength-division multiplexing cross-connect nodes in plastic optical fiber（POF） transmission systems.In this paper, a polymer/silica hybrid waveguide thermo–optic attenuator based on multimode interference（MMI） coupler is designed and fabricated to operate at 650 nm. The single-mode transmission condition, MMI coupler, and transition taper dimensions are optimized through the beam propagation method. Thermal analysis based on material properties provides the optimized heater placement angle. The fabricated VOA presents an attenuation of 26.5 dB with a 21-mW electrical input power at 650 nm. The rise time and fall time are 51.99 and 192 μs, respectively. The time–stability measurement results prove its working reliability.
