CO2and O2were employed as reactive gases to fabricate carbon-doped titanium oxide films using DC reactive magnetron sputtering.Microstructure,composition and optical band gap of the films were investigated by X-ray diffraction,X-ray photoelectron spectroscopy,and UV–visible spectrophotometer,respectively.The results showed that carbon-doped titanium monoxide films(C-TiO) with a carbon concentration of 5.8 at.% were obtained in an Ar/CO2mixed atmosphere.However,carbon-doped rutile and anatase(C-TiO2) with a carbon concentration of about 1.4 at.% were obtained in an Ar/CO2/O2mixed atmosphere.The optical band gaps of C-TiO and C-TiO2were about 2.6 and 2.9 eV,respectively.Both of them were narrower than that of pure TiO2films.Films with narrowed optical band gap energy are promising in promoting their photo-catalytic activity.
Dong XieFeng WenWenmao YangXueyuan LiYongxiang LengGuojiang WanHong SunNan Huang
