To improve the machining precision of a surface grinding machine, a micropositioning workpiece table with high performance was used as auxiliary infeed mechanism to implement nanometer level positioning and dynamic compensation. To better understand the characteristics of the grinding machine modulated with micropositioning workpiece table, the dynamic model of the grinding system was established with modal synthesis and Lagrange＇s equation methods. The grinding system was divided into five subsystems. For each subsystem, the generalized kinematic and potential energies were obtained. Accordingly the dynamic model of the grinding system was given in the modal domain. The waviness of the grinding process was achieved based on the wheel and workpiece vibration. A nonlinear proportional integral derivative （PID） controller with differential trackers was developed to realize dynamic control. The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micropositioning workpiece table to implement dynamic compensation. An experimental test was carried out to verify the proposed method, and the waviness of the workpiece can be reduced from 0.46 μm to 0.10 μm.
In order to achieve active grinding control, a novel numerical controlmicropositioning workpiece table with a resolution of 6 nm has been developed. The table is drivenby three piezoelectric actuators mounted on the base. An elastic structure with three half-notchflexure hinges is designed to apply preload to the piezoelectric actuators. The position of flexurebinges is also elaborately designed with consideration to reduce the bending deformation of themoving part. Three capacitive sensors are used to form close loop control system. Considering thetable as a damped 3-DOF mass-spring system, the models of static and dynamic stiffness and errorowing to the action of external forces have been established. In order to make the table have highresolution and positioning accuracy, an error compensation algorithm is implemented by using theestablished models. The experimental testing has been carried out to verify the performance of theworkpiece table and the established models of the micropositioning workpiece table.
