This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor,which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS).The sensor includes a silicon substrate, platinum bottom electrode,platinum top electrode,and a ZnO piezoelectric thin film,which is sandwiched between the two-electrode layers.The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7pc/uN.The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time,and manipulating the tissue safely.
The micro touch sensor which is designed to be used in the blood vessels is proposed.Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype of micro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal method is made. The basic properties of the micro touch sensor are studied. In order to analyse the properties of the micro touch sensor, a mathematical model is set up.
