A 3D temperature field distribution of biological tissue for superficial hyperthermia using a pulse modulated microwave （PMMW） was presented. A 3D sliced homogeneous phantom was radiated by the PMMW and an infrared thermal imager was applied to image temperature distribution throughout the phantom. The period of the PMMW is 3 s and the output power is 35 W. The temperature rises by at least 3 ℃ in the phantom when the duty cycle varies from 1/3, 1/2, 2/3 to 1 （denoted by scenarios 1-4）. Both the accumulative temperature-volume histogram and the relative depth-area ratio histogram show that the maximum temperature rise （MTR） is 6.6 and 8 ℃ in scenarios 2 and 3, and they are superior to scenarios 1 and 4. Furthermore, the PMMW can control temperature field distribution of biological tissue. It provides both preliminary basis for thermal volume control and new technology for temperature control and monitor in superficial hyperthermia.
