研制了一种新型全聚合物49信道绝热低偏振相关阵列波导光栅(AWG)芯片。利用直接紫外光写入技术,实现了波导芯片的设计与制备。利用Matlab软件对AWG的传输特性进行了优化模拟,通过对聚合物衬底的热膨胀系数和聚合物波导的热光系数进行调控,得到了器件良好的绝热低偏振相关特性。测得AWG的中心波长为1550.918 nm,波长间隔为0.8 nm,插入损耗的信道变化范围是5.51 d B^10.62 d B,串扰大于20 d B,偏振漂移和温度变化分别是0.08 nm和0.03 nm/K。这种新技术十分适用于高性能多功能集成光路中,具有广阔的应用前景。
A nanosecond response waveguide electro-optic （EO） switch based on ultraviolet （UV） sensitive polymers of Norland optical adhesive （NOA73） and Dispersed Red 1 （DR1） doped SU-8 （DR1/SU-8） is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.
