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国家自然科学基金(60825403)

作品数:27 被引量:55H指数:4
相关作者:刘明谢常青陈军宁朱效立龙世兵更多>>
相关机构:中国科学院微电子研究所安徽大学中国工程物理研究院更多>>
发文基金:国家自然科学基金国家重点基础研究发展计划国家高技术研究发展计划更多>>
相关领域:电子电信自动化与计算机技术理学机械工程更多>>

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27 条 记 录,以下是 1-10
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Study of top and bottom contact resistance in one organic field-effect transistor
2009年
This paper reports that the organic field-effect transistors with hybrid contact geometry were fabricated,in which the top electrodes and the bottom electrodes were combined in parallel resistances within one transistor.With the facility of the novel structure,the difference of contact resistance between the top contact geometry and the bottom contact geometry was studied.The hybrid contact devices showed similar characteristics with the top contact configuration devices,which provide helpful evidence on the lower contact resistance of the top contact configuration device.The origin of the different contact resistance between the top contact device and the bottom contact device was discussed.
刘舸刘明王宏商立伟姬濯宇刘兴华柳江
关键词:场效应晶体管接触电阻接触器
Improving the electrical performance of resistive switching memory using doping technology被引量:6
2012年
In this paper, improvements of resistive random access memory (RRAM) using doping technology are summarized and analyzed. Based on a Cu/ZrO2/Pt device, three doping technologies with Ti ions, Cu, and Cu nanocrystal, respectively, are adopted in the experiments. Compared to an undoped device, improvements focus on four points: eliminating the electroforming process, reducing operation voltage, improving electrical uniformity, and increasing device yield. In addition, thermal stability of the high resistance state and better retention are also achieved by the doping technology. We demonstrate that doping technology is an effective way of improving the electrical performance of RRAM.
WANG YanLIU OiLU HangBingLONG ShiBingWANG WeiLI YingTaoZHANG SenLIAN WenTaiYANG JianHongLIU Ming
关键词:电气性能记忆体随机存取存储器纳米晶体
Approaches for improving the performance of filament-type resistive switching memory被引量:2
2011年
Resistive random access memory (RRAM) has received significant research interest because of its promising potential in terms of down-scaling,high density,high speed and low power. However,its endurance,retention and uniformity are still imperfect. In this article,the physical mechanisms of filament-type RRAM and the approaches for improving the switching performance,including doping,process optimization and interface engineering,are introduced.
LIAN WenTaiLONG ShiBingLU HangBingLIU QiLI YingTaoZHANG SenWANG YanHUO ZongLiangDAI YueHuaCHEN JunNingLIU Ming
关键词:开关性能记忆体随机存取物理机制
基于I-V特性的阻变存储器的阻变机制研究被引量:11
2009年
随着器件尺寸的缩小,阻变存储器(RRAM)具有取代现有主流Flash存储器成为下一代新型存储器的潜力。但对RRAM器件电阻转变机制的研究在认识上依然存在很大的分歧,直接制约了RRAM的研发与应用。通过介绍阻变存储器的基本工作原理、不同的阻变机制以及基于阻变存储器所表现出的不同I-V特性,研究了器件的阻变特性;详细分析了阻变存储器的五种阻变物理机制,即导电细丝(filament)、空间电荷限制电流效应(SCLC)、缺陷能级的电荷俘获和释放、肖特基发射效应(Schottky emission)以及普尔-法兰克效应(Pool-Frenkel);同时,对RRAM器件的研究发展趋势以及面临的挑战进行了展望。
李颖弢刘明龙世兵刘琦张森王艳左青云王琴胡媛刘肃
关键词:非挥发性存储器I-V特性
Top contact organic field effect transistors fabricated using a photolithographic process
2011年
This paper proposes an effective method of fabricating top contact organic field effect transistors by using a pho-tolithographic process.The semiconductor layer is protected by a passivation layer.Through photolithographic and etching processes,parts of the passivation layer are etched off to form source/drain electrode patterns.Combined with conventional evaporation and lift-off techniques,organic field effect transistors with a top contact are fabricated suc-cessfully,whose properties are comparable to those prepared with the shadow mask method and one order of magnitude higher than the bottom contact devices fabricated by using a photolithographic process.
王宏姬濯宇商立伟刘兴华彭应全刘明
关键词:有机场效应晶体管光刻工艺蚀刻工艺荫罩
Phase zone photon sieve被引量:2
2009年
A novel diffractive optical element,named phase zone photon sieve(PZPS),is presented.There are three kinds of phase plates in PZPSs:PZPS1,PZPS2,and PZPS3.Each of the PZPSs has its own structure and is made on quartz substrate by etching.The three PZPSs have stronger diffraction peak intensity than a photon sieve(PS) when the margin pinhole and zone line width are kept the same.The PZPS3 can produce a smaller central diffractive spot than the ordinary PS with the same number of zones on the Fresnel zone plate.We have given the design method for and the simulation of PZPS and PS.PZPS has potential applications in optical maskless lithography.
贾佳谢常青
关键词:光子光衍射
自支撑透射光栅的设计、制作和测试被引量:4
2010年
采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300nm、线宽/周期比为0.55、厚度为200nm、总面积为1mm×1mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在5.5—38nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35nm范围内的极紫外波段具有基本稳定的衍射效率.
马杰谢常青叶甜春刘明
关键词:电子束光刻电镀
Nonvolatile memory devices based on organic field-effect transistors被引量:1
2011年
Among the many possible device configurations for organic memory devices,organic field-effect transistor (OFET) memory is an emerging technology with the potential to realize lightweight,low-cost,flexible charge storage media.In this feature article,the recent progress in the classes of OFET-based memory,including floating gate OFET memory,polymer electret OFET memory,ferroelectric OFET memory and several other kinds of OFET memories with unique configurations,are introduced.Finally,the prospects and problems of OFETs memory are discussed.
WANG HongPENG YingQuanJI ZhuoYuLIU MingSHANG LiWeiLIU XingHua
关键词:有机场效应晶体管非易失性存储器内存记忆体重量轻
EBL制备用于气体传感器的SAW延迟线的方法
2010年
电子束光刻(EBL)具有高的分辨率,能制备具有亚微米尺寸的声表面波(SAW)器件。一种采用EBL技术制备用于气体传感器的具有亚微米尺寸的SAW延迟线的方法:首先利用EBL在压电衬底上获得叉指换能器(IDT)的电子抗蚀剂图形;然后用剥离工艺制作出IDT电极。通过邻近效应校正和提高场拼接精度,制作的叉指电极具有一致性,电极形貌好。相对于干法刻蚀工艺,剥离工艺避免了对压电衬底表面的物理损伤。该技术为实现特征尺寸达到百纳米级的更高工作频率SAW器件的制造提供了很好的途径。
赵以贵刘明牛洁斌陈宝钦
关键词:电子束光刻声表面波延迟线叉指换能器
阵列位相环匀光器
2010年
基于衍射光学中的角谱理论,针对一种分布为同心3环、相位为0.9π,0和0.9π的结构进行深入分析,提出一种10×10的3环2值位相环阵列结构,并与二元光学中的10×10的菲涅尔波带片阵列结构进行比较,应用MATLAB软件仿真632.8nm激光器的高斯光通过二者后的效果。结果表明,阵列3环2值位相环对高斯光的匀光效果要明显优于阵列菲涅尔波带片,该阵列可以对激光束在远场的衍射光场进行修正,能较大地改善高斯光的匀光效果,在光均匀性要求较高的场合具有广泛的应用前景。
万青松谢常青贾佳潘一鸣刘明吴秀龙陈军宁
关键词:光束整形二元光学
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