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国家自然科学基金(60571014)

作品数:9 被引量:7H指数:2
相关作者:冯冠平张超张志甜刘岩王文炎更多>>
相关机构:清华大学研究院清华大学更多>>
发文基金:国家自然科学基金更多>>
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9 条 记 录,以下是 1-9
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钽酸锂单晶材料的横向场激励特性
2009年
用(yxl)-16.51°切型的钽酸锂(LiTaO3)加工制作两个电极在同一基板平面的横向场激励器件来验证该材料的横向场激励特性。理论上用扩展的Christoffel-Bechmann方法计算了LiTaO3材料的横向场激励机电耦合系数,其c模式值最大为37.9%。实验结果表明在空气中横向场激励在5.257MHz频率附近引起了一个明显的谐振主峰,谐振处阻抗为727Ω;在液体中由于液体模拟电极的作用而形成了厚度场激励,使其在5.695MHz附近产生了另外一个谐振主峰。通过对声波相速度和谐振频率的计算也验证了实验结果。
王文炎张超张志甜刘岩冯冠平敬刚
关键词:钽酸锂机电耦合系数相速度
用于液相检测的横向场激励模式压电传感器被引量:1
2009年
与传统基于石英晶体微天平的压电传感器相比,横向场激励模式压电传感器具有更优异的性能。该文基于微声波理论,分析了横向场激励模式压电体声波器件的声传播机理,计算了石英晶体在任意切型及横向电场方向上的压电耦合系数,并根据计算结果设计了新型的传感器结构。3种不同浓度的水溶液用于测试传感器对液体粘度、介电常数和电导率等变化的响应。结果表明,横向场激励压电传感器不仅具有较好的质量敏感效应,还对被测液体电特性参数变化具有较高的灵敏度,可用于研制复合型压电生物传感器。
王文炎张超张志甜刘岩冯冠平敬刚
关键词:生物传感器灵敏度
Lateral field excitation properties of langasite single crystal
2010年
In this work, bulk acoustic wave propagation properties of langasite single crystal excited by lateral electric field have been investigated. Three important crystal cuts have been identified for different operational modes of lateral field excitation (LFE) on langasite substrate, namely the (yxl)65° (pure-LFE mode), (yxl)45° (quasi-LFE mode), and (yxl)0° (pseudo-LFE mode). Devices on langasite substrate with the above cuts were fabricated and tested, and the experimental results agree well with the theoretical analysis. It is found that a pure thickness shear mode exists in the (yxl)65° langasite LFE device with the bare side facing liquid, and no spurious mode is found due to its moderately large piezoelectric coupling factor. In addition, (yxl)0° langasite LFE device is also found suitable for liquid phase sensing applications.
马廷锋张超冯冠平江小宁
关键词:LANGASITE
Thickness shear mode quartz crystal resonators with optimized elliptical electrodes
2011年
Quartz crystal resonators (QCRs) with circular electrodes have been widely used for various liquid and gas sensing applications. In this work, quartz crystal resonators with elliptical electrodes were studied and tested for liquid property measurement. Mindlin's theory was used to optimize the dimension and geometry of the electrodes and a 5-MHz QCR with minimum series resistance and without any spurious modes was obtained. A series of AT-cut QCRs with elliptical electrodes of different sizes were fabricated and their sensing performances were compared to devices with circular electrodes. The experimental result shows that the device with elliptical electrodes can obtain lower resonance impedance and a higher Q factor, which results in a better loading capability. Even though the sensitivities of devices with elliptical and circular electrodes are found to be similar, the sensor with elliptical electrodes has much higher resolution due to a better frequency stability. The study indicates that the performance of QCRs with elliptical electrodes is superior to that of traditional QCRs with circular electrodes.
马廷锋张超江小宁冯冠平
Properties study of LiNbO_3 lateral field excited device working on thickness extension mode
2010年
This paper investigates the properties of thickness extension mode excited by lateral electric field on LiNbO3 by using the extended Christoffel-Bechmann method. It finds that the lateral field excitation coupling factor for amode (quasi-extensional mode) reaches its maximum value of 28% on Xmcut LiNbO3. The characteristics of a lateral field excitation device made of X-cut LiNbO3 have been investigated and the lateral field excitation device is used for the design of a high frequency ultrasonic transducer. The time and frequency domain pulse/echo response of the LiNbO3 lateral field excitation ultrasonic transducer is analysed with the modified Krimholtz-Leedom-Matthae model and tested using traditional pulse/echo method. A LiNbO3 lateral field excitation ultrasonic transducer with the centre frequency of 33.44 MHz and the -6 dB bandwidth of 33.8% is acquired, which is in good agreement with the results of the Krimholtz-Leedom-Matthae model. Further analysis suggests that the LiNbO3 lateral field excitation device has great potential in the design of broadband high frequency ultrasonic transducers.
张志甜张超王文炎马廷锋刘岩冯冠平
基于横向场激励的高频压电超声换能器被引量:2
2010年
介绍了一种基于横向场激励模式的高频压电超声换能器及其设计、分析和制作过程。采用扩展的Christoffel-Bech-mann方法对LiNbO3、LiTaO3和PMN-33PT三种不同压电材料的a模式横向场压电耦合系数进行了计算,发现这三种材料中LiNbO3具有最大的LFE a模式压电耦合系数,为28%。采用具有最大压电耦合系数的X切LiNbO3设计并制作了基于横向场激励的高频超声换能器,并采用传统的Pulse-Echo方法测试了该超声换能器的中心频率和带宽。实验测得该LFE高频超声换能器的中心频率为34MHz,-6dB带宽为14.4%。从理论和实验上证明了横向场激励模式可以应用于高频超声换能器。
张志甜张超冯冠平
关键词:铌酸锂
横向场激励的BT-切石英传感器研究被引量:1
2010年
研究了BT-切石英横向场激励(LFE)的耦合特性、声波相速度及其传感器在液体中的敏感性能。理论计算表明,当横向场方向与晶轴x方向垂直时,b模式的LFE耦合系数达到最大值6.68%,a和c模式的LFE耦合系数为0,此时激发的声波相速度也达到最大值5 079 m/s。实验发现,器件在液体中,具有较高的机械及电特性灵敏度。结果表明,在b-模式LFE耦合系数为0的方向上,器件实际上工作在伪横向场激励模式。
王文炎张超张志甜刘岩冯冠平
横向场压电液相传感器测量方法的研究被引量:3
2009年
研究了横向场压电液相传感器的串联谐振频率、动态电阻、机械品质因数等特性参数的测量方法。采用自动调制电容补偿技术对静态电容进行了有效补偿,保证了串联臂特性的检测;同时结合直接数字式频率合成器(DDS)技术,实现了半功率点法对机械品质因数的测试。实验结果表明,该方法测量的动态电阻范围大(达到5kΩ),稳定性较高。
王文炎张超张志甜刘岩冯冠平敬刚
关键词:压电传感器
Lateral-field-excitation properties of LiNbO_3 single crystal
2009年
LiNbO3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO3 single crystal excited by a lateral electric field have been investigated using the extended Christoffel Bechmann method. It is found that the LFE piezoelectric coupling factor for c mode reaches its maximum value of 95.46% when ψ = 0° for both (yxl)-58° and (yxwl)±60°/58° LiNbO3. The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of ψ. Here ψ represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58° LiNbO3 with ψ = 0° was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 Ω and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO3 device can be a good platform for high performance resonator or sensor applications.
王文炎张超张志甜刘岩冯冠平
关键词:LINBO3
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