YBCO superconducting films were prepared by Electron Beam Coevaporation method.All the YBCO films were annealed at 760°C in humidity range of 2.3-?9.5.Microstructure of the YBCO thin films was analyzed by means of X-ray diffraction(XRD) and scanning electron microscopy(SEM).Superconducting properties of the YBCO films were measured by electromagnetic induction method.XRD results showed that c-axis-oriented grains existed in the YBCO films.Morphologies of the YBCO films showed that all the films had a smooth and crack-free surface.YBCO films prepared at 7.3% humidity condition showed Jc value of 4.6 MA cm-2 at 77 K in self-field.
