A single-loop fourth-order sigma-delta（ΣΔ） interface circuit for a closed-loop micromachined accelerometer is presented.Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter.The three main noise sources affecting the overall system resolution of aΣΔaccelerometer, mechanical noise,electronic noise and quantization noise,are analyzed in detail.Accurate mathematical formulas for electronic and quantization noise are established.The ASIC is fabricated in a 0.5μm two-metal two-poly n-well CMOS process.The test results indicate that the mechanical noise and electronic noise are 1μg/（Hz）^（1/2） and 8μV/（Hz）^（1/2） respectively,and the theoretical models of electronic and quantization noise agree well with the test and simulation results.
基于SOG(Silicon on Glass)工艺设计了一种新型电容式加速度传感器结构,分析了该结构的检测和反馈原理.为了提高闭环微加速度传感器的性能,更好地实现闭环控制调节作用,对传感器系统进行了研究.在反馈系统中引入PID控制器,并建立了SIMLINK系统模型,分析了系统闭环传递函数以及控制参数对传感器系统的影响.仿真结果表明:PID控制器可以很好地改善系统的频率响应,增加系统带宽,调节系统的阻尼,减小系统的响应时间和调节时间,大大提高了闭环加速度计的性能.
