High transparency in visible region was required for red-light-emitting Y2O3:Eu3+ thin film phosphors. Such films were obtained via chemical bath deposition on bare SiO2 glass substrates through heterogeneous nucleation with further heat treatment. Thin amorphous yttrium basic carbonate films could be completely transformed to crystalline Y2O3 at 650 °C. X-ray diffraction and field-emission scanning electron microscopy were used to characterize these products. The deposition temperature and the post-anneali...