Polyethylene terephthalate (PET) has been modified by Si ion implantationwith a dose ranging from 1 x10^(16) to 2x10^(17) ions /cm^2 using a metal vapor vacuum arc (MEVVA)source. The surface morphology was observed by atomic force microscopy (AFM). The change in themicro-structure of Si implanted PET was observed with a transmission electron microscope (TEM). Itis believed that the change would improve the conductive properties and wear resistance. Theelectrical properties of PET have been improved via Si ion implantation. The resistivity ofimplanted PET decreased obviously with an increase in ion dose. When Si ion dose was 2x10^(17)cm^(-2), the resistivity of PET could be less than 7.9 Ω ? m. The surface hardness andmodulus increased obviously. The mechanical property of the implanted PET has been modified greatly.The hardness and modulus of Si implanted PET with a dose of 2 x 10^(17)/cm^2 are 12.5 and 2.45times greater than those of pristine PET, respectively. The area of cutting groove for Si implantedPET is narrower and shallower than those of the unimplanted PET. So the wear resistance is greatlyraised. In comparison with metal ion implantation, the improvement of mechanical properties isobvious in ion implantation into PET. Si ion beam modification mechanism of PET is discussed.
