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国家自然科学基金(10502051)

作品数:5 被引量:8H指数:2
相关作者:舒勇华李帅辉樊菁唐锦荣王连红更多>>
相关机构:中国科学院力学研究所更多>>
发文基金:国家自然科学基金更多>>
相关领域:理学一般工业技术农业科学电子电信更多>>

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Kinetic study of the Rayleigh-Bénard flows
2009年
The present paper employs the direct simulation Monte Carlo (DSMC) method to study the Rayleigh-Bénard flows, where the temperature ratio of the upper to lower plate is fixed to 0.1. For a Knudsen number (Kn) of 0.01, as the Rayleigh number (Ra) increases, the flow changes from the thermal conductive state to the convective state at about Ra=1700, and the calculated relation of heat flux through the lower plate versus Ra is in good agreement with classical experimental and theoretical results. For Kn=0.05, the thermal conductive state remains stable, and the increase of Ra cannot trigger thermal instability.
ZHANG Jun FAN Jing
关键词:热对流动力学研究蒙特卡洛法
Thickness and component distributions of yttrium-titanium alloy films in electron-beam physical vapor deposition被引量:4
2008年
Thickness and component distributions of large-area thin films are an issue of in-ternational concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal reso-nators, deposited film thickness distribution measured by Rutherford backscat-tering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level.
LI ShuaiHuiSHU YongHuaFAN Jing
关键词:DISTRIBUTIONSATOMNON-EQUILIBRIUM
真空辐射加热基片的温度分布被引量:2
2006年
真空辐射加热下基片表面温度分布的均匀性是薄膜制备中的关键问题之一.采用数值计算和比色红外测温两种方法,研究了作者自行研制的真空辐射加热器(IMCAS-VRH)的性能.利用IMCAS—VRH加热直径6in的单晶硅基片,当电功率为3860W时,基片表面平均温度为1093K,整个基片上的温度变化的测量值约为6 K.基片表面温度分布的计算结果与测量数据符合得很好,进一步的计算分析表明钼丝对辐射的遮挡效应、隔热屏和基片热传导等对基片温度分布均匀性有重要影响.
李帅辉舒勇华唐锦荣樊菁
Effect of humidity on microstructure and properties of YBCO films prepared by Electron Beam Coevaporation被引量:2
2012年
YBCO superconducting films were prepared by Electron Beam Coevaporation method.All the YBCO films were annealed at 760°C in humidity range of 2.3-?9.5.Microstructure of the YBCO thin films was analyzed by means of X-ray diffraction(XRD) and scanning electron microscopy(SEM).Superconducting properties of the YBCO films were measured by electromagnetic induction method.XRD results showed that c-axis-oriented grains existed in the YBCO films.Morphologies of the YBCO films showed that all the films had a smooth and crack-free surface.YBCO films prepared at 7.3% humidity condition showed Jc value of 4.6 MA cm-2 at 77 K in self-field.
WANG LianHongSHU YongHuaFAN Jing
关键词:YBCO
预处理气氛对电子束蒸发制备YBCO薄膜性能和结构的影响
2013年
采用先电子束沉积后退火的两步法制备YBCO超导薄膜;根据薄膜的超导临界电流密度、X射线衍射(XRD)和扫描电镜(SEM)的测试结果,研究了不同预处理气氛对YBCO薄膜结构、表面形貌及超导性能的影响。
王连红舒勇华刘崇李帅辉李保林樊菁
关键词:YBCO超导薄膜预处理
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