An extensive study of the composition distribution, bonding strength, hardness, and wear resistance of a 0Cr18Ni9 film deposited on a Ti811 titanium alloy surface by ion beam enhanced deposition （IBED） is presented. Shot peening was introduced to post-treat the modified surface to synergistically improve the fretting fatigue resistance of the Ti811 alloy at 350°C. The results indicate that the 0Cr18Ni9 film with high density, small grain size, low void radio, and high bonding strength can be prepared using IBED. As a result, the hardness, wear resistance, and fretting fatigue resistance of the Ti811 alloy are increased to a remarkable extent. Compared with shot peening treatment or IBED 0Cr18Ni9 film alone, the Ti811 titanium alloy with an IBED 0Cr18Ni9 film combined with shot peening shows a higher fretting fatigue resistance at 350°C. This is due to the synergistic effect of the high wear resistance of the film surface and the residual compressive stress induced by shot peening.
