A method of micro-scanning location adaptive calibration was proposed, which was realized by the digital image micro-displacement estimation. With geometric calculation, this calibration method used the displacement estimation of two thermal microscope images to get the size and direction of each scanning location calibration angle. And each location calibration process was repeated according to the offset given by the system beforehand. The comparison experiments of sequence oversampling reconstruction before and after the micro-scanning location calibration were done. The results showed that the calibration method effectively improved the thermal microscope imaging quality.
