用分子束外延设备在c面蓝宝石衬底上生长得到高质量Mg x Zn1-x O薄膜。X射线衍射显示,当Mg摩尔分数在0~32.7%范围内时,薄膜保持六方结构,(002)衍射峰半高宽为0.08°~0.12°,薄膜结晶质量与现有报道的最高水平相当。随着薄膜中Mg含量的增加,紫外发光峰由378 nm蓝移至303 nm。对Mg0.108Zn0.892O薄膜变温光致发光光谱的研究发现,束缚激子发光随温度变化存在两个不同的猝灭过程。对不同Mg含量薄膜共振拉曼光谱的研究发现,A1(LO)声子模频移与Mg含量在一定范围内呈线性关系,这为确定Mg x Zn1-x O薄膜中的Mg含量提供了一种简单高效的方法。通过拉曼光谱与X射线衍射对比研究发现,拉曼光谱在确定MgZnO材料相变时具有更高的灵敏度。最后,研究了Mg0.057Zn0.943O薄膜的变温共振拉曼光谱,对A1(LO)和A1(2LO)声子模随温度而变化的现象给出了一定的理论解释。
Stable nitrogen doping is an important issue in p-type ZnO research for device applications.In this paper,beryllium and magnesium are systematically compared as a dopant in ZnO to reveal their nitrogen-stabilizing ability.Secondary ion mass spectrum shows that Be and Mg can both enhance the stability of nitrogen in ZnO while Be has a better performance.Zn 2p and O 1s electron binding energies change in both MgZnO and Be ZnO thin films.Donor-acceptor luminescence is observed in the BeZnO samples.We conclude that Be is a better co-doping element than Mg for p-type ZnO：N.
