Platinum-Iridium alloy films were prepared by MOCVD on Mo substrate using metal-acetylacetonate precursors. Effects of deposition conditions on composition, microstructure and mechanical properties were determined. In these experimental conditions, the purities of films are high and more than 99.0%. The films are homogeneous and monophase solid solution of Pt and Ir. Weight percentage of platinum are much higher than iridium in the alloy. Lattice constant of the alloy changes with the platinum composition. Iridium composition showing an up-down-up trend at the precursor temperature of 190~230℃ and the deposition temperature at 400~ 550℃. The hardness of Pt-Ir alloys prepared by MOCVD is three times more than the alloys prepared by casting.
